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Semiconductor Solutions
SIMAGIS® Semi is the automated image
metrology software suite for semiconductor applications. It provides
number of ready-to-run customizable software modules for lithography
process control as well as
defect and failure analysis.
SIMAGIS® Semi was designed and developed in collaboration with
leading semiconductor companies as a singe complete solution for
semiconductor metrology lab automation. This software enables the lab to
obtain all critical image metrology data in a single application
package, speed up the analysis process and integrate information
management.
Flexible set of solution modules include powerful algorithms that
deliver comprehensive fully automated measurements from individual
images or aggregate batches and can be customized by the user for
specific imaging and reporting needs.
SIMAGIS® Semi includes the following
Automated Image Metrology Modules:
Get link for the document
Specify your name and e-mail in
the form below to get a link to our paper
recently presented at the NIST conference:
Automated Metrology for SEM Calibration and CD Line Measurements
Using Image Analysis and SEM Modeling Methods (PDF format, 2 MB)
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